JPS59148251U - ウエハプロ−バの測定針研磨装置 - Google Patents

ウエハプロ−バの測定針研磨装置

Info

Publication number
JPS59148251U
JPS59148251U JP4119183U JP4119183U JPS59148251U JP S59148251 U JPS59148251 U JP S59148251U JP 4119183 U JP4119183 U JP 4119183U JP 4119183 U JP4119183 U JP 4119183U JP S59148251 U JPS59148251 U JP S59148251U
Authority
JP
Japan
Prior art keywords
polishing device
wafer prober
measurement needle
needle polishing
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4119183U
Other languages
English (en)
Japanese (ja)
Other versions
JPS64270Y2 (en]
Inventor
谷本　勝美
英一 小林
Original Assignee
ロ−ム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ロ−ム株式会社 filed Critical ロ−ム株式会社
Priority to JP4119183U priority Critical patent/JPS59148251U/ja
Publication of JPS59148251U publication Critical patent/JPS59148251U/ja
Application granted granted Critical
Publication of JPS64270Y2 publication Critical patent/JPS64270Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
JP4119183U 1983-03-21 1983-03-21 ウエハプロ−バの測定針研磨装置 Granted JPS59148251U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4119183U JPS59148251U (ja) 1983-03-21 1983-03-21 ウエハプロ−バの測定針研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4119183U JPS59148251U (ja) 1983-03-21 1983-03-21 ウエハプロ−バの測定針研磨装置

Publications (2)

Publication Number Publication Date
JPS59148251U true JPS59148251U (ja) 1984-10-03
JPS64270Y2 JPS64270Y2 (en]) 1989-01-06

Family

ID=30171785

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4119183U Granted JPS59148251U (ja) 1983-03-21 1983-03-21 ウエハプロ−バの測定針研磨装置

Country Status (1)

Country Link
JP (1) JPS59148251U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH022939A (ja) * 1988-06-13 1990-01-08 Tokyo Electron Ltd プローブ装置および検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH022939A (ja) * 1988-06-13 1990-01-08 Tokyo Electron Ltd プローブ装置および検査方法

Also Published As

Publication number Publication date
JPS64270Y2 (en]) 1989-01-06

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